AMOLF NanoLab Amsterdam equipment info
Cleanroom facilities
AMOLF NanoLab Amsterdam includes an ISO class 5 cleanroom with facilities for optical- and electron beam lithography and plasma etching, a facility for thin film deposition, and innovative optical tools for nanofabrication, manipulation and analysis.
Equipment
Researchers have access to a wide range of fabrication and inspection techniques in cleanroom environments, such as: Electron Beam Lithography, NUV lithography, two-photon lithography, FIB milling/deposition, EBID, reactive ion etching, thin film deposition, rapid thermal annealing, FE-SEM, EDX, Cathode luminescence, AFM, STM, surface profiling, spectroscopic ellipsometry, optical microscopy.
Cleanroom sample preparation
- Wet benches – Organic, anorganic and general purpose wet bench
- Spin coater – Suss Delta 80 Spin coater
- Critical point dryer – Autosamdri
- UV lithography system – Suss MABA6 Mask aligner
- E-Beam lithography system – Voyager
- 3D direct laser writing lithography – Nanoscribe
- Low Pressure Oxygen Plasma System – Sinvacon Diener Pico
- RIE/ICP Plasma etcher – Oxford Plasmalab 80+
- RIE/ICP Plasma etcher – Oxford PlasmaPro100 Cobra
- Etching – XeF2 etcher
- RTA – Rapid Thermal Anneal
- Vacuum oven – General purpose vacuum oven
- Tube vacuum furnace (Homebuilt)
Thin film production
- Double sputter coater – Leica EM ACE600
- E-beam PVD system – E-flex
- Sputter PVD system – S-Flex
- Deposition system ICPECVD – Oxford PlasmaPro100 ICPECVD
- Vacuum coating system – Nanoontje (Homebuilt)
- Vacuum coating system – Handy Smurf (Homebuilt)
Materials Characterization
- Optical microscope – Zeiss Axioskop2 mat
- Surface profiler – KLA-Tencor alpha-step 500
- Atomic Force Microscopy (AFM) – Veeco Dimension 3100 AFM
- Scanning Electron Microscope – FEI Verios 460
- Scanning Electron Microscope – FEI XL30 SEM
- Dualbeam FIB / SEM – FEI Helios nanolab 600
- TEM – FEI TecnaiG2 20 X-Twin
- Thin film analyzer – Filmetrics F20 UVX
- Ellipsometry – Ellipsometer VB-400 J.A. Woollam
Dedicated equipment
- High speed saw – DISCO DAC-2SP/86