Silicon waveguide

Veeco Dimension 3100 AFM


Atomic Force Microscopy (AFM) is a high resolution scanning probe microscope with resolution on the order of sub nanometer. The AFM consist of a cantilever with a sharp tip used to scan the surface of a sample.



  • Veeco Dimension 3100 AFM
  • Sample size 150 mm diameter 12 mm thick
  • Stage movement x-y 150 mm with 2 micron resolution
  • Video optics with zoom 150-675 micron viewing area
  • Piezo scan head range; 90 micron x-y and 6 micron in z
  • 16 bits DAC giving sub nanometer resolution
  • Max 512 x 512 samples/image
  • Contact and tapping mode AFM
  • Conductive AFM
  • STM
  • Liquid cell

Wikipedia – Atomic force microscopy