Silicon waveguide

Tube oven

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Vacuum tube furnace to anneal samples.

1112_thinfilm_HJB8306

Specifications

  • Max temperature 1200 0C
  • Dry turbomolecular pumped system
  • Equipped with sample loadlock
  • Ultimate vacuum 10-6 mbar
  • Introduction process gas up to 10-4 mbar
  • Max.sample size 15x50x10 mm