AMOLF NanoLab Amsterdam

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AMOLF NanoLab Amsterdam process data

Standardized processes

  • Base Piranha clean
  • ZEP520 – (semi)conductive substrates
  • ZEP520 – non-conductive substrates

Datasheets

  • HSQ (FOx / XR-1541 – Dow Corning)
  • LOR lift off resist (Microchem)
  • HMDS primer (MCC Primer – Microchem)
  • Ma-N 240x (Microresist)
  • PGMI lift off resist (Microchem)
  • PMMA (Microchem)
  • S1813 (Shipley–>Rohm & Haas)
  • SU-8 2000 5-15 (Microchem)
  • SU-8 2000 25-75 (Microchem)

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