AMOLF NanoLab Amsterdam

Rules & Registration
Equipment booking
Equipment info
Process data
Service fees
NEWS

Back to main page

AMOLF NanoLab Amsterdam process data

Standardized processes

Base Piranha clean
ZEP520 – (semi)conductive substrates
ZEP520 – non-conductive substrates

Datasheets

HSQ (FOx / XR-1541 – Dow Corning)
LOR lift off resist (Microchem)
HMDS primer (MCC Primer – Microchem)
Ma-N 240x (Microresist)
PGMI lift off resist (Microchem)
PMMA (Microchem)
S1813 (Shipley–>Rohm & Haas)
SU-8 2000 5-15 (Microchem)
SU-8 2000 25-75 (Microchem)

© AMOLF 2023