Ellipsometer VB-400 J.A. Woollam
The ellipsometer VB-400 J.A. Woollamdetermines optical constants like refractive index and extinction coefficient and thin film thickness.
Specifications
- J.A. Woollam VB-400 variable angle spectroscopic ellipsometer (VASE)
- Woollam HS 190 monochromator
- Vertical sample mount
- Samples up to 100mm wafer
- Beam chopper is placed at the output of the monochromator
- Synchronous detection
- 293 to 1700nm
- WVASE software