Silicon waveguide

Ellipsometer VB-400 J.A. Woollam


The ellipsometer VB-400 J.A. Woollamdetermines optical constants like refractive index and extinction coefficient and thin film thickness.


  • J.A. Woollam VB-400 variable angle spectroscopic ellipsometer (VASE)
  • Woollam HS 190 monochromator
  • Vertical sample mount
  • Samples up to 100mm wafer
  • Beam chopper is placed at the output of the monochromator
  • Synchronous detection
  • 293 to 1700nm
  • WVASE software

Wikipedia – Ellipsometry