Silicon waveguide

FEI Helios Nanolab 600


This SEM / FIB combines a scanning microscope (SEM) and focused ion beam (FIB) with gas chemistries.


Schottky Field Emission Gun, SFEG Sidewinder ion column
Resolution 0.9 nm at 15 kV Ga liguid metal ion source, Ga LMIS
Accelerating voltage 350 V – 30 kV Resolution 5 nm at 30 kV
Maximum beam current 22 nA Accelarating voltage 0.5 – 30 kV
Beam current 1.5 pA – 20 nA
Gas chemistry EBID/IBID; Charge neutralizer
 Platinum deposition  Fast beam blanker
Gold deposition  Sample load lock
Insulator enhanced etch (XeF2) RF plasma cleaning system
Insulator deposition II (TEOS) EvactronMax. sample size 80 mm diameter with full travel

More: Wikipedia – Focused ion beam