FEI Helios Nanolab 600

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This SEM / FIB combines a scanning microscope (SEM) and gallium focused ion beam (FIB) with gas chemistries.

Specifications

• FEI Helios Nanolab 600
• Sample size max. diameter 150 mm thickness 20 mm
• SEM; Schottky Field Electron Gun (SFEG)
• Electron beam; 1pA to 22 nA, 350V- 30kV, 1 nm resolution
• FIB: Sidewinder Galium Liquid Metal Ion Source (Ga LMIS)
• Galium Ion beam; 1.5pA – 20 nA, 500V- 30kV, 5 nm resolution
• Charge neutralizer
• 5 axis UHR motorized sample stage; XY: 150mm, Z: 10mm, Tilt: -10° to +60°, rotation: 360° endless
• NavCam sample navigation
• detectors;
  -ETD (Everhardt Thornley Detector)
  -TLD (Through the Lens Detector)
  -CDEM for secondary electron and secondary ion imaging
  -IR camera for sample navigation
• Gas injector system (GIS);
  -Platinum metal deposition
  -SiO2 Insulator deposition (TEOS)
  -Carbon deposition
  -Insulator enhanced etch (XeF2)
• Fast Beam Blanker
• Sample load lock
• Plasma cleaner (Evactron)
• Cryo Cleaner

More
Wikipedia – Focused ion beam