Leica EM ACE600 Double sputter coater
The system employs two magnetron targets, argon discharge plasma, giving a fine-grain, cool sputtering of thin metal films.
Specifications
- Leica EM ACE600 Double sputter coater
- turbo molecular pumped (10^-5 to 10^-7 mbar)
- motorized stage for even distribution of coating material
- 2 sputter targets
- shutter assembly
- film thickness monitor
- glow discharge pre clean target materials or activate the sample surface
- available materials: Ag, Al, Au, Au/Pd, C, Cr, Cu, Ge, Ni, Pd, Si, Ti, W
- sample-size: up to 100 mm wafer