Silicon waveguide

Handy Smurf

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Homebuilt fast coating system, dedicated dirty system for high vapor pressure materials not allowed in Nanoontje.

1511_handy_smurf_s

Specifications

  • turbo pumped with base pressure 10^-6 mbar
  • resistance heating  evaporation
  • 1 crucible made out Al2O3, Quartz, BN, Ta, Mo, C or intermetallic
  • flexible sample mounting max 4” diameter
  • shutterplate
  • quartz thickness monitor