KLA Tencor Stylus Profiler P7
The Profiler P7 is a mechanical contact, stylus-based step profiler that can measure step heights with sub-angstrom resolution.
Specifications
- KLA Tencor stylus profiler P7
- Substrate size from 3 x 3 mm up to 150mm diameter 3 mm thickness
- 2-micron radius 60 cone degree angled tip
- 0.5 – 50 mg stylus constant force
- 150mm scan length and 1mm Z range
- Vertical resolution 0.4 nm
- Maximum horizontal resolution 25 nm
- Manual rotation stage
- 2D / 3D scanning
- Top view optical navigation camera 2 x 1.2 mm field of view
- Applications / measurementsThin film / resist step height
- Thin film / resist step height
- Surface roughness
- 3D imaging
- Flatness or curvature
- 2D stress in thin films
- 3D-Stress software package
