FEI XL30 SEM
The FEI XL30 S FEG is an ultra high resolution Scanning Electron Microscope (SEM)
Specifications
- Resolution; 1.5 nm at 10 kV
- Accelerating voltage 0.2-30 kV
- Beam current 1 pA to 25 nA
- Detectors; ET, SE or BSE
- End pressure in specimen chamber 10-6 mbar
- Equipped with;
Energy dispersive X-ray spectroscopy (EDX), Electron BackScatter Diffraction (EBSD) and a home build Cathodoluminescence detector