Nanoontje
Turbo pumped vacuum system with base pressure 10-7 mbar. Capable to mount 4 crucibles. Dedicated programmable shutter plate.
Specifications
- Homebuilt system Nanoontje
- Resistance heating evaporation
- Flexible sample mounting
- Substrate rotation with shutter plates
- Quarts thickness monitor
- Max 4 materials
- Plasma discharge cleaning