Silicon waveguide

FEI Verios 460


High resolution scanning electron microscope with nanometer resolution.


  • FEI Verios 460
  • Sample size max. diameter 100 mm thickness 20 mm
  • Schottky Field Electron Gun (SFEG)
  • Electron Current 1pA to 22 nA
  • sample landing energy range 50V- 30kV
  • Electron energie monochromator for low energy spread < 0.2 eV
  • 100 mm high precision 5 axis piezo stage sample;
  • NavCam sample navigation
  • Energy Dispersive Spectroscopy (EDS) Oxford Xmax 80 mm^2 Silicon Drift Detector
  • Elektron Backscatter Diffraction (EBSD) detector
  • Homebuilt Electron Beam Induced Current Detector (EBIC) detector
  • Plasma Cleaner
  • Cryo Cleaner
  • Electron detectors;
    -ETD (Everhardt Thornley Detector)
    -TLD (Through the Lens Detector)
    -MD (Mirror Detector) mounted inside the objective lens; compositional and topographic contrast
    -iCD (in-Column Detector) 10 cm above the MD in the column; reduced topographical but highlights compositional contrast
    -BSD (Back Scatter Detector) retractable, inserted below the pole piece with 4 different concentric segments
    -STEM (Scanning Transmission Electron Microscopy detector) retractable, BF DF HAADF (High Angle Angular Dark Field) 12 segments

Wikipedia –┬áScanning electron microscope