FEI Verios 460

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High resolution scanning electron microscope with nanometer resolution.

Specifications

• FEI Verios 460
• Sample size max. diameter 100 mm thickness 20 mm
• Schottky Field Electron Gun (SFEG)
• Electron Current 1pA to 22 nA
• sample landing energy range 50V- 30kV
• Electron energie monochromator for low energy spread < 0.2 eV
• 100 mm high precision 5 axis piezo stage sample;
• NavCam sample navigation
• Energy Dispersive Spectroscopy (EDS) Oxford Xmax 80 mm^2 Silicon Drift Detector
  
• Elektron Backscatter Diffraction (EBSD) detector
• Homebuilt Electron Beam Induced Current Detector (EBIC) detector
• Plasma Cleaner
• Cryo Cleaner
• Electron detectors;
  -ETD (Everhardt Thornley Detector)
  -TLD (Through the Lens Detector)
  -MD (Mirror Detector) mounted inside the objective lens; compositional and topographic contrast
  -iCD (in-Column Detector) 10 cm above the MD in the column; reduced topographical but highlights compositional contrast
  -BSD (Back Scatter Detector) retractable, inserted below the pole piece with 4 different concentric segments
  -STEM (Scanning Transmission Electron Microscopy detector) retractable, BF DF HAADF (High Angle Angular Dark Field) 12 segments

More
Wikipedia – Scanning electron microscope