X-ray reflectivity of an Sb delta-doping layer in silicon Back to all publications Publication date 1 January 1990 Reference W.F.J. Slijkerman, J.M. Gay, P.M. Zagwijn, J.F. van der Veen, J.E. MacDonald, A.A. Williams, D.J. Gravesteijn and G.F.A. van de Walle, X-ray reflectivity of an Sb delta-doping layer in silicon, J. Appl. Phys. 68, 5105-5108 (1990) Download (pre)print
