Thermal stability of supersaturated oxygen-doped silicon epitaxial films Back to all publications Publication date 1 January 1990 Reference A.E.M.J. Fischer, W.F.J. Slijkerman, J.F. van der Veen and I. Ohdomari, Thermal stability of supersaturated oxygen-doped silicon epitaxial films, Appl. Surf. Sci. 44, 115-119 (1990)
