The use of a pulsed laser for shallow-junction processing

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Reference W.C. Sinke, A. Polman, W.G.J.H.M. van Sark and F.W. Saris: The use of a pulsed laser for shallow-junction processing In: Sixth E.C. Photovoltaic Solar Energy Conference : Proceedings of the International Conference held in London, U.K., 15-19 April 1985 /ed. W. Palz and F.C. Treble, Reidel, 1985. - pp. 1011-1016
Group Photonic Materials