The thin-film reaction between Ti and thermally grown SiO2 Back to all publications Publication date 1 January 1987 Reference J.C. Barbour, A.E.M.J. Fischer and J.F. van der Veen, The thin-film reaction between Ti and thermally grown SiO2, J. Appl. Phys. 62, 2582-2584 (1987) Request this article
