| Reference |
D. Hoonhout, Y. Tamminga, W.R. Garrett and F.W. Saris: The influence of the dopant and annealing of ion-implanted silicon with a ruby laser In: Proceedings of "Laser Effects in Ion Implanted Semiconductors", Catania, August 31 - September 2, 1978 /ed. E. Rimini, Istituto di Struttura della Materia Universit, 1978. - pp. 168-179 |
