| Reference |
A.G. Cullis, D.C. Jacobson, A. Polman, P.W. Smith, J.M. Poate and C.R. Whitehouse: The energy dependence of ion damage in AlxGa1-xAs/GaAs heterostructures and the effects of implanted impurity In: Phase Formation and Modification by Beam-Solid Interactions : Symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A. /ed. G.S. Was, L.E. Rehn and D.M. Follstaedt, Materials Research Society, 1992. - pp. 229-234 |
