Tailoring the optical properties of Si nanocrystals in SiO2: Materials issues and nanocrystal laser perspectives
Si nanocrystals (diameter 2 – 5 nm) were formed by 35 keV Si+ implantation at a fluence of 6×1016 Si/cm2 into a 100 nm thick thermally grown SiO2 film on Si (100), followed by thermal annealing at 1100
