| Reference |
F.W. Saris: Surface science and semiconductor processing In: Crucial Issues in Semiconductor Materials and Processing Technologies : Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies, Erice, Italy, 1-13 July 1991 /ed. S. Coffa, F. Priolo, E. Rimini and J.M. Poate, Kluwer, 1992. - pp. 147-152 |
