Surface disruption as an observable factor in the energy distribution of sputtered particles Back to all publications Publication date 1 January 1982 Reference H.E. Roosendaal, R.A. Haring and J.-B. Sanders, Surface disruption as an observable factor in the energy distribution of sputtered particles, Nucl. Instrum. Methods Phys. Res. 194, 579-581 (1982) Request this article