| Reference |
N. Herbots, D. Gloesener, E.J. van Loenen and A.E.M.J. Fischer: Surface characterization of arsenic implanted silicon (100): a new insight into the inhibition of aluminium/silicon interdiffusion In: Layered Structures, Epitaxy, and Interfaces : Symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A. /ed. J.M. Gibon and L.R. Dawson, Materials Research Society, 1985. - pp. 613-617 |
