Summary Abstract: Nanosecond ultraviolet laser induced etching of Si and Cu exposed to Cl2 Back to all publications Publication date 1 January 1987 Reference G.N.A. van Veen, T.S. Baller, J. Dieleman and A.E. de Vries, Summary Abstract: Nanosecond ultraviolet laser induced etching of Si and Cu exposed to Cl2, J. Vac. Sci. Technol. A 5, (1987)
