Structural characterization of an Sb delta-doping layer in silicon Back to all publications Publication date 1 January 1989 Reference W.F.J. Slijkerman, P.M. Zagwijn, J.F. van der Veen, A.A. van Gorkum and G.F.A. van de Walle, Structural characterization of an Sb delta-doping layer in silicon, Appl. Phys. Lett. 55, 963-965 (1989) Request this article
