Sputtering of SiO2 in a XeF2 and in a Cl2 atmosphere Back to all publications Publication date 1 January 1986 Reference D.J. Oostra, R.A. Haring and A.E. de Vries, Sputtering of SiO2 in a XeF2 and in a Cl2 atmosphere, J. Vac. Sci. Technol. B 4, 1278-1282 (1986)
