Some physical aspects of sputtering

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Reference P. K. Rol, D. Onderdelinden and J. Kistemaker: Some physical aspects of sputtering In: 1965 Transactions of the Third International Vacuum Congress, 28 June-2 July 1965, Stuttgart, Germany, Vol. 1 : Invited Papers /ed. H. Adam, Pergamon, 1966. - pp. 75-82