Solid phase epitaxial regrowth of microcrystalline Si films on a (100) Si substrate

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Reference S. Roorda, S. Saito and W.C. Sinke: Solid phase epitaxial regrowth of microcrystalline Si films on a (100) Si substrate In: Fundamentals of Beam-Solid Interactions and Transient Thermal Processing : Symposium held November 30-December 3, 1987, Boston, Massachusetts, USA /ed. M.J. Aziz, L.E. Rehn and B. Stritzker, Materials Research Society, 1988. - pp. 417-422