Single crystal sputtering and the channeling phenomenon

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Reference D. Onderdelinden: Single crystal sputtering and the channeling phenomenon In: Colloque International sur les Applications des Faisceaux Ioniques a la Technologie des Semiconducteurs = International Conference on Applications of Ions [sic] Beams to Semiconductor Technology, Grenoble, 24-26 Mai, 1967 /ed. P. Glotin, Editions Ophrys, 1967. - pp. 389-395