Silicon molecular beam epitaxy on arsenic-implanted and laser-processed silicon Back to all publications Publication date 1 January 1982 Reference L. Smit, T. de Jong, D. Hoonhout and F.W. Saris, Silicon molecular beam epitaxy on arsenic-implanted and laser-processed silicon, Appl. Phys. Lett. 40, 64-65 (1982) Request this article
