Silicon consumption in excimer-laser-assisted chemical vapour deposition of tungsten Back to all publications Publication date 1 January 1991 Reference A.J.P. van Maaren, P.M. Zagwijn and W.C. Sinke, Silicon consumption in excimer-laser-assisted chemical vapour deposition of tungsten, Mater. Sci. Eng. B 8, 181-188 (1991)
