Residual damage to an atomically cleaned low-temperature-annealed Si (100) surface Back to all publications Publication date 1 January 1980 Reference I. Yamada, D. Marton and F.W. Saris, Residual damage to an atomically cleaned low-temperature-annealed Si (100) surface, Appl. Phys. Lett. 37, 563-565 (1980) Request this article
