Reduction of boron diffusion in silicon by 1 MeV 29Si+ irradiation Back to all publications Publication date 1 January 1991 Reference V. Raineri, R. Schreutelkamp, F.W. Saris, K.T.F. Janssen and R.E. Kaim, Reduction of boron diffusion in silicon by 1 MeV 29Si+ irradiation, Appl. Phys. Lett. 58, 922-924 (1991) Request this article
