Reactive sputtering of simple condensed gases by keV ions III: kinetic energy distributions Back to all publications Publication date 1 January 1984 Reference R.A. Haring, R. Pedrys, D.J. Oostra and A.E. de Vries, Reactive sputtering of simple condensed gases by keV ions III: kinetic energy distributions, Nucl. Instrum. Methods Phys. Res., Sect B 5, 483-488 (1984) Request this article
