Reactive sputtering of simple condensed gases by keV heavy ion bombardment Back to all publications Publication date 1 January 1983 Reference R.A. Haring, F.S. Klein, A.C. Kummel and A.E. de Vries, Reactive sputtering of simple condensed gases by keV heavy ion bombardment, Nucl. Instrum. Methods 211, 529-533 (1983) Request this article
