Reference |
J. Ishikawa, S. Douma, W.H. Urbanus, S. Doorn, J.G. Bannenberg and F.W. Saris: Progress report on the microwave ion source as injector for an MeV implanter In: Proceedings of the Tenth Symposium on Ion Sources and Ion-Assisted Technology; ISIAT'86; June 2nd-4th, 1986 /ed. T. Takagi, Kyoto University, 1986. - pp. 105-110 |