Production and beam annealing of damage in carbon implanted silicon. II Back to all publications Publication date 1 January 1978 Reference W.H. Kool, H.E. Roosendaal, L.W. Wiggers and F.W. Saris, Production and beam annealing of damage in carbon implanted silicon. II, Radiat. Eff. 36, 41-48 (1978)
