Pre-amorphization damage in Si(100) implanted with high mass MeV ions Back to all publications Publication date 1 January 1992 Reference R. Schreutelkamp, J.S. Custer, J.R. Liefting, F.W. Saris, W.X. Lu, B.-X. Zhang and Z.L. Wang, Pre-amorphization damage in Si(100) implanted with high mass MeV ions, Nucl. Instrum. Methods Phys. Res., Sect B 62, 372-376 (1992) Request this article