Near threshold sputtering of Si and Si02 in a CI2 environment Back to all publications Publication date 1 January 1987 Reference D.J. Oostra, R.P. van Ingen, R.A. Haring, A.E. de Vries and G.N.A. van Veen, Near threshold sputtering of Si and Si02 in a CI2 environment, Appl. Phys. Lett. 50, 1506-1508 (1987) Request this article
