Modulation doping structures in silicon by molecular beam epitaxy and off-line ion implantation Back to all publications Publication date 1 January 1983 Reference T. de Jong, W.A.S. Douma, S. Doorn and F.W. Saris, Modulation doping structures in silicon by molecular beam epitaxy and off-line ion implantation, Mater. Lett. 1, 157-162 (1983)
