Material reaction and silicide formation at the refractory metal/silicon interface Back to all publications Publication date 1 January 1986 Reference G.W. Rubloff, R.M. Tromp and E.J. van Loenen, Material reaction and silicide formation at the refractory metal/silicon interface, Appl. Phys. Lett. 48, 1600-1602 (1986) Request this article