Low energy ion beam mixing as a tool for multilayer x-ray mirror fabrication

We present low energy ion beam mixing as a tool for the fabrication of composite layers with smooth interfaces. Using this tool we make a stack of alternating layers of Si and Mo_xSi_y. We measure composition and interfacial roughness (s) and find ^x/_yª and sª4 Å. The method can be applied to reduce absorption losses in x-ray multilayer mirrors for high-resolution dispersive purposes, and to increase thermal stability of multilayers. The thickness of the mixed layers is found