Laser processing in silicon molecular beam epitaxy

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Reference T. de Jong, L. Smit and F.W. Saris: Laser processing in silicon molecular beam epitaxy In: Laser and Electron-Beam Interactions with Solids : Proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A. /ed. B.R. Appleton and G.K. Celler, North-Holland, 1982. - pp. 215-220