| Reference |
A.J.P. van Maaren and W.C. Sinke: Laser induced photochemical vapor deposition of tungsten on silicon In: Chemical Vapor Deposition of Refractory Metals and Ceramics : Symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /ed. Th.M. Besmann and B.M. Gallois, Materials Research Society, 1990. - pp. 293-298 |
