Laser-induced etching of Si with chlorine Back to all publications Publication date 1 January 1986 Reference T.S. Baller, D.J. Oostra, A.E. de Vries and G.N.A. van Veen, Laser-induced etching of Si with chlorine, J. Appl. Phys. 60, 2321-2326 (1986) Request this article