Ion etching of thin W layers: enhanced reflectivity of W-C multilayer coatings Back to all publications Publication date 1 January 1991 Reference E.J. Puik, M.J. van der Wiel, H. Zeijlemaker and J. Verhoeven, Ion etching of thin W layers: enhanced reflectivity of W-C multilayer coatings, Appl. Surf. Sci. 47, 63-76 (1991) Request this article
