Ion bombardment of X-ray multilayer coatings: comparison of ion etching and ion assisted deposition Back to all publications Publication date 1 January 1991 Reference E.J. Puik, M.J. van der Wiel, H. Zeijlemaker and J. Verhoeven, Ion bombardment of X-ray multilayer coatings: comparison of ion etching and ion assisted deposition, Appl. Surf. Sci. 47, 251-260 (1991) Request this article
