Ion beam modification of Mo-Si multilayer systems for X-ray reflection Back to all publications Publication date 1 January 1992 Reference J. Verhoeven, L. Chunguang, E.J. Puik, M.J. van der Wiel and T.P. Huijgen, Ion beam modification of Mo-Si multilayer systems for X-ray reflection, Appl. Surf. Sci. 55, 97-103 (1992) Request this article
