Ion beam-induced anisotropic plastic deformation of silicon microstructures Back to all publications Publication date 1 January 2004 DOI http://dx.doi.org/10.1063/1.1737480 Reference T. van Dillen, M.J.A. de Dood, J.J. Penninkhof, A. Polman, S. Roorda and A.J. Vredenberg, Ion beam-induced anisotropic plastic deformation of silicon microstructures, Appl. Phys. Lett. 84, 3591-3593 (2004) Group Photonic Materials “” Request this article
