Ion beam-induced anisotropic plastic deformation at 300 keV Back to all publications Publication date 1 January 2003 DOI http://dx.doi.org/10.1063/1.1629793 Reference T. van Dillen, A. Polman, C.M. van Kats and A. van Blaaderen, Ion beam-induced anisotropic plastic deformation at 300 keV, Appl. Phys. Lett. 83, 4315-4317 (2003) Group Photonic Materials “” Request this article