Ion-assisted etching of silicon by molecular chorine Back to all publications Publication date 1 January 1984 Reference F.H.M. Sanders, A.W. Kolfschoten, J. Dieleman, R.A. Haring and A.E. de Vries, Ion-assisted etching of silicon by molecular chorine, J. Vac. Sci. Technol. A 2, 487-491 (1984)
